Journal profile · Engineering, Electrical & Electronic
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN 1071-1023 · A V S AMER INST PHYSICS · UNITED STATES · Bimonthly · Founded 1991
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: CAS Zone 4 · Engineering (2025 upgraded edition); impact factor 1.61; hybrid open access; review about 3 months (community reports); community-reported acceptance: easy; 170 articles a year; indexed in SCIE.
Scope
Aims, scope and focus
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B is published by A V S AMER INST PHYSICS and is in Zone 4 of Engineering in the CAS Journal Ranking (2025 upgraded edition). By OpenAlex counts of its recent articles, its largest topics are Semiconductor materials and devices, Advancements in Photolithography Techniques and Semiconductor Quantum Structures and Devices, together about 30.4% of its articles. Its main subfields are Atomic and Molecular Physics, and Optics and Electrical and Electronic Engineering. (generated from OpenAlex topic counts and CAS ranking data)
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.
Source: LetPub
Research area (LetPub): Engineering, Electrical & Electronic
Main research topics OpenAlex counts of recent articles; shares are approximate
- Semiconductor materials and devicesEngineering15%
- Advancements in Photolithography TechniquesEngineering8.7%
- Semiconductor Quantum Structures and DevicesPhysics and Astronomy6.7%
- Integrated Circuits and Semiconductor Failure AnalysisEngineering6.5%
- Electron and X-Ray Spectroscopy TechniquesMaterials Science5.4%
- Force Microscopy Techniques and ApplicationsPhysics and Astronomy5.4%
- Metal and Thin Film MechanicsEngineering3.9%
- Ion-surface interactions and analysisEngineering3.6%
Rankings & indexing
CAS ranking and database indexing
CAS Journal Ranking
CAS Journal Ranking, upgraded edition (March 2025)Engineering Zone 4
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 4 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Nanoscience & Nanotechnology | Zone 4 |
| Minor | Physics, Applied | Zone 4 |
Top journal: noReview journal: no
CAS Xinrui Journal Ranking (March 2026)Engineering Zone 4
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 4 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Nanoscience & Nanotechnology | Zone 4 |
| Minor | Physics, Applied | Zone 4 |
Top journal: noReview journal: not marked
CAS Journal Ranking, previous upgraded edition (December 2023)Engineering Zone 4
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 4 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Nanoscience & Nanotechnology | Zone 4 |
| Minor | Physics, Applied | Zone 4 |
Top journal: noReview journal: no
Database indexing
SCIELetPub
International journal early-warning lists: not listed in any editionLetPub
Editions, and major and minor categories, are shown separately and never merged into one zone; check which edition your institution uses before you submit or report.
Metrics
Impact metrics and publication volume
Impact
- Impact factor
- 1.61LetPub ·
- h-index
- 142OpenAlex ·
- i10-index
- 6,156OpenAlex ·
- 2-year mean citedness
- 0OpenAlex ·
- Self-citation rate
- 6.2%LetPub ·
- Share of gold OA articles
- 9.78%LetPub ·
Volume
- Articles per year
- 170LetPub ·
Sources count differently and were observed at different times, so each source's own value is kept; "publisher" marks figures from the journal's website.
Review & acceptance
Review time and acceptance
- Average review time (community reports)
- about 3 monthsLetPub ·
- Average acceptance (community reports)
- EasyLetPub ·
Community reports come from authors' own submissions (confidence 0.5) and are not a promise from the journal; for publisher figures, the journal's own definitions apply.
Fees & open access
APC and open-access policy
Hybrid open accessLetPub
A subscription journal in which authors can pay to publish their article open access.
No source has fee information yet; check the journal's website.
A hybrid journal charges the APC only when the author chooses open access; publishing under the subscription model is usually free.
The journal's website is authoritative for fees; sources were observed at different times and each keeps its own value, without averaging.
Profile
Publication details and official links
- Publisher
- A V S AMER INST PHYSICS
- Country or region
- UNITED STATES
- Language
- English
- Frequency
- Bimonthly
- Founded
- 1991
- ISSN
- 1071-1023
- Official links
- Journal homepage ↗LetPub
- Submission system ↗LetPub
FAQ
Frequently asked questions about JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
What CAS zone is JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B in?
In the 2025 upgraded edition of the CAS Journal Ranking, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B is in Zone 4 of Engineering, and in Zone 4 of the minor category Engineering, Electrical & Electronic / Nanoscience & Nanotechnology / Physics, Applied. In the 2026 Xinrui edition it is in Zone 4 of Engineering. Zones from different editions, and from major and minor categories, are not interchangeable.
What is the impact factor of JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B?
The latest impact factor listed by LetPub is 1.61; h-index 142.
How long does peer review take at JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B?
Authors report an average review time of about 3 months; the community-reported acceptance is “Easy”. Article statistics cover accepted papers only, publisher figures follow the journal's own definitions, and community reports come from authors' own submissions; none is a promise from the journal.
Which databases index JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B?
According to LetPub and DOAJ records, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B is indexed in SCIE.
Is JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B open access, and what is the APC?
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B is a hybrid journal. Fee information is not available yet; check the journal's website.
Sources and updates
The facts on this page come from LetPub, OpenAlex; every figure is tagged with its source and the date it was observed, and conflicting values are kept per source. LetPub source page: view ↗ (archived 2026-08-25). Last updated: .