Journal profile · Engineering, Electrical & Electronic

Microelectronic Engineering

ISSN 0167-9317 · eISSN 1873-5568 · Elsevier · NETHERLANDS · Monthly · Founded 1983

Microelectronic Engineering: CAS Zone 3 · Engineering (2025 upgraded edition); impact factor 3.29; hybrid open access; APC about USD 2,860; review about 59 days (submission to acceptance, publisher); community-reported acceptance: easy; 95 articles in 2025; indexed in SCIE and Scopus.

Impact factor3.29Latest value listed by LetPub
CAS zoneZone 3 · Engineering2025 upgraded edition, major category · 2026 Xinrui edition Zone 3 · Engineering
Review time59 daysPublisher-reported, submission to acceptance · community reports about 6 months
APCUSD 2,860Hybrid journal: charged only for open-access articles
AcceptanceEasyCommunity average
Articles per year952025 · OpenAlex count

Scope

Aims, scope and focus

Microelectronic Engineering is published by Elsevier and is in Zone 3 of Engineering in the CAS Journal Ranking (2025 upgraded edition). By OpenAlex counts of its recent articles, its largest topics are Semiconductor materials and devices, Advancements in Photolithography Techniques and Integrated Circuits and Semiconductor Failure Analysis, together about 34% of its articles. Its main subfields are Electrical and Electronic Engineering. (generated from OpenAlex topic counts and CAS ranking data)

Nanotechnology and Processing — Electronics, photonics, MEMS and Life Sciences Affiliated with iMNEsMicroelectronic Engineering is the premier journal focused on the fabrication and characterization of micro/nano-electronic materials, devices and circuits (including novel electronic nanomaterials), as well as the understanding of their working mechanisms, performance, yield, variability, stability, and reliability. The journal also focuses on the techniques that make possible the fabrication and characterization of such devices and circuits, and on the materials involved in them. Occasionally, outstanding papers on simulation of materials properties, device figures-of-merit or compact modeling of circuits and systems may be accepted. The following topics are of special interest:DevicesPhotonic and optoelectronic devices (including, sensors, actuators, phototransistors)Transistors (including ultra-scaled, thin film, organic, ferroelectric)Resistive switching devices (memristors, RRAM, PCRAM, FeRAM, MRAM)Magnetic and spintronic devicesMEMS and NEMS (including power, RF, magnetic, organic)Flexible electronic devices (including wearable, printed, paper)Devices for energy harvesting (piezoelectric, flexoelectric, photovoltaic, solar cells)Bioelectronic devices (molecular detection, biomimetic, diagnosis)Device-level simulations (including variability and reliability)MaterialsWide bandgap semiconductorsDielectrics (low K and high K)Two-dimensional (2D) Materials and related transferring techniquesNanotubes, nanowires, and other nanomaterials and nanostrctures for device fabricationInterconnects, metallization and barrier materialsNew Resist MaterialsSilicon on insulatorsPolymers and flexible substrates, including biocompatible materialsAtomistic simulations of materials propertiesFabrication and characterization processesThin films deposition techniques (CVD, ALD, evaporation, sputtering, MBE, plasma)Lithography (including optical, EUV, electron beam, nanoimpring, particle-assisted, mask less, X-ray optical methods, emerging methods and limits, as well as resists)Pattern transfer (including ion, plasma and wet transfer, as well as transfer of 2D materials)Integration processes (including inkjet printing, 3D printing, 3D integration)Top-down and bottom-up self-assembly processesAnnealing and its effect in the materials (including crystallization, wrinkling, de-wetting)Nanometrology (TEM, SEM, EDX, EELS, STM, AFM and related setups)Circuits and applicationsSensing and actuation, including bio-compatible applicationsSignal souring and transferLogic operations and data processingElectronic memories and information storageArtificial neural networks and neuromorphic computingCompact modeling of electronic circuitsQuantum computingFive different types of articles are considered:Research articles that report regular original research that produces significant advancement.Accelerated Publications (Letters) that feature exciting research breakthroughs.Review Articles that inform readers of the latest research and advances in a topic within the broad field of microelectronic engineering. This includes roadmaps and guides proposing the recommended methods in a specific field.Short / Technical notes intended for original limited investigations or short description of original industrial or industrially-related research and development workNews and Opinions that comment on topical issues or express views on the developments in related fields, or comment on previously published work

From the journal's Aims & Scope

Research area (LetPub): Engineering, Electrical & Electronic

Editor-in-chief Mario LanzaPublisher website

Editorial board by country: 19 in mainland China (about 31%); most named Mainland China 19, Saudi Arabia 9, India 6, Italy 4, Singapore 4 (62 members with a country) Editorial board ↗Publisher website ·

Main research topics OpenAlex counts of recent articles; shares are approximate

  1. Semiconductor materials and devicesEngineering16.5%
  2. Advancements in Photolithography TechniquesEngineering9.8%
  3. Integrated Circuits and Semiconductor Failure AnalysisEngineering7.6%
  4. Advancements in Semiconductor Devices and Circuit DesignEngineering6.9%
  5. Nanofabrication and Lithography TechniquesEngineering6.5%
  6. Advanced Surface Polishing TechniquesEngineering4.6%
  7. Copper Interconnects and ReliabilityMaterials Science4.5%
  8. Semiconductor materials and interfacesPhysics and Astronomy3.9%

Rankings & indexing

CAS ranking and database indexing

CAS Journal Ranking

CAS Journal Ranking, upgraded edition (March 2025)Engineering Zone 3
LevelCategoryZone
MajorEngineeringZone 3
MinorEngineering, Electrical & ElectronicZone 3
MinorOpticsZone 3
MinorPhysics, AppliedZone 3
MinorNanoscience & NanotechnologyZone 4

Top journal: noReview journal: no

CAS Xinrui Journal Ranking (March 2026)Engineering Zone 3
LevelCategoryZone
MajorEngineeringZone 3
MinorEngineering, Electrical & ElectronicZone 3
MinorNanoscience & NanotechnologyZone 3
MinorOpticsZone 3
MinorPhysics, AppliedZone 3

Top journal: noReview journal: not marked

CAS Journal Ranking, previous upgraded edition (December 2023)Engineering Zone 4
LevelCategoryZone
MajorEngineeringZone 4
MinorEngineering, Electrical & ElectronicZone 4
MinorNanoscience & NanotechnologyZone 4
MinorOpticsZone 4
MinorPhysics, AppliedZone 4

Top journal: noReview journal: no

Database indexing

SCIEScopusLetPub

International journal early-warning lists: not listed in any editionLetPub

Indexing the journal's website claims

INISPublisher website

As the journal's website lists them, not checked against each database; for Web of Science editions the records above apply.

Editions, and major and minor categories, are shown separately and never merged into one zone; check which edition your institution uses before you submit or report.

Metrics

Impact metrics and publication volume

Impact

Impact factor
3.29LetPub ·
Impact factor (publisher)
3.3Publisher website ·
CiteScore 2026-06
7.4LetPub ·
CiteScore (publisher)
7.4Publisher website ·
SJR 2026-06
0.6LetPub ·
SNIP 2026-06
1.08LetPub ·
h-index
89LetPub ·
h-index
123OpenAlex ·
i10-index
5,922OpenAlex ·
2-year mean citedness
3.51OpenAlex ·
Self-citation rate
0%LetPub ·
Share of gold OA articles
19.05%LetPub ·

Volume

Articles per year
85LetPub ·

Articles by year OpenAlex count · 14,113 in total · the current year is incomplete

YearArticlesOpen accessCitations
202646138
20259526291
20249724537
2023116361,128
2022137381,820
2021121181,328

Sources count differently and were observed at different times, so each source's own value is kept; "publisher" marks figures from the journal's website.

Review & acceptance

Review time and acceptance

Publisher-reported review time from the journal's website

59 dayssubmission to acceptance · community reports about 6 months

The publisher's own definition applies; dates from this journal's articles in the last 24 months are not available yet, so the publisher's figure is used.

Figures by source

Average review time (community reports)
about 6 monthsLetPub ·
Average acceptance (community reports)
EasyLetPub ·
Submission to first decision
6 daysPublisher website ·
First decision after review
41 daysPublisher website ·
Submission to acceptance
59 daysPublisher website ·
Acceptance to publication
7 daysPublisher website ·
Peer review
Single anonymous peer reviewPublisher website

Community reports come from authors' own submissions (confidence 0.5) and are not a promise from the journal; for publisher figures, the journal's own definitions apply.

Fees & open access

APC and open-access policy

Hybrid open accessLetPub

A subscription journal in which authors can pay to publish their article open access.

SourceAPCFee waiverLicenseObserved
OpenAlexUSD 2,860 / EUR 2,610 / GBP 2,290 / JPY 337,420——
Publisher websiteUSD 3,520——

A hybrid journal charges the APC only when the author chooses open access; publishing under the subscription model is usually free.

The journal's website is authoritative for fees; sources were observed at different times and each keeps its own value, without averaging.

Submission

Article types and submission policies (journal website)

What to prepare3 items from the author guidelines
Abstract
≤ 250 words
Manuscript length
≤ 8,000 words
Reference style
Numbered, in order of citation
Publisher website · model-extracted, each line checked against the text
Article types accepted13, with length limits
  1. accelerated publications (letters)Accelerated Publications (Letters) that feature exciting research breakthroughs.Length not stated
  2. letterReview Articles Microelectronic Engineering (MEE) welcomes submissions of review articles on scientifically and technically important and current topics within …Length not stated
  3. news and opinionsNews and Opinions that comment on topical issues or express views on the developments in related fields, or comment on previously published workLength not stated
  4. opinionReview Articles Microelectronic Engineering (MEE) welcomes submissions of review articles on scientifically and technically important and current topics within …Length not stated
  5. original researchReview Articles Microelectronic Engineering (MEE) welcomes submissions of review articles on scientifically and technically important and current topics within …Length not stated
  6. regular paperReview Articles Microelectronic Engineering (MEE) welcomes submissions of review articles on scientifically and technically important and current topics within …Length not stated
  7. research articleResearch articles that report regular original research that produces significant advancement.Accelerated Publications (Letters) that feature exciting research …Length not stated
  8. research articlesResearch articles that report regular original research that produces significant advancement.Length not stated
  9. review articleReview Articles Microelectronic Engineering (MEE) welcomes submissions of review articles on scientifically and technically important and current topics within …main text ≤ 8,000 words
  10. review articlesReview Articles that inform readers of the latest research and advances in a topic within the broad field of microelectronic engineering.Length not stated
  11. short / technical notesShort / Technical notes intended for original limited investigations or short description of original industrial or industrially-related research and developmen…Length not stated
  12. short communicationReview Articles Microelectronic Engineering (MEE) welcomes submissions of review articles on scientifically and technically important and current topics within …Length not stated
  13. technical noteResearch articles that report regular original research that produces significant advancement.Accelerated Publications (Letters) that feature exciting research …Length not stated
Publisher website
Policy excerpts from the journal's websiteAI use, Authorship, Conflicts of interest, License & copyright, Open access, Peer review, Preprints
AI use Declaration of generative AI use

Authors must declare the use of generative AI tools in the manuscript preparation process upon submission of the paper.Generative AI and AI-assisted technologies (“AI tools”) have been rapidly adopted in research and scholarly publishing, offering significant benefits while requiring clear standards for responsible and transparent use.Authors preparing a manuscript for this journal may use AI tool…

Source ↗Publisher website ·
Authorship Group authorship

Group authorship refers to the attribution of an article to a defined and named group of authors whose members have contributed to the work. Examples include research consortia, clinical trial groups, collaborative networks, task forces or working groups, expert panels or consensus groups, and participatory research groups. Group authorship must be declared on the title page at submission. When av…

Source ↗Publisher website ·
Conflicts of interest Declaration of competing interests

All authors must disclose any financial and personal relationships with other people or organizations that could inappropriately influence or bias their work. Examples of potential competing interests include:EmploymentConsultanciesStock ownershipHonorariaPaid expert testimonyPatent applications or registrationsGrants or any other fundingAffiliation with the journal as an Editor or Advisory Board …

Source ↗Publisher website ·
License & copyright License options

Authors will be offered open access user license options which will determine how you, and third parties, can reuse your open access article. We advise that you review these options and any funding body license requirements before selecting a license option.

Source ↗Publisher website ·
Open access Open access

We refer you to our open access information page to learn about open access options for this journal.

Source ↗Publisher website ·
Peer review Peer review

This journal follows a single anonymized review process. Your submission will initially be assessed by our editors. If your submission is deemed suitable, it will typically be sent to be reviewed by a minimum of two reviewers for an independent expert assessment of the scientific quality. The decision as to whether your article is accepted or rejected for publication will be made by our editors.Re…

Source ↗Publisher website ·
Preprints Preprints

Preprint sharingAuthors may share preprints in line with Elsevier's article sharing policy. Sharing preprints, such as on a preprint server, will not count as prior publication.We advise you to read our policy on multiple, redundant or concurrent publication. In support of Open Science, this journal offers its authors a free preprint posting service on SSRN, Elsevier’s preprint and early research …

Source ↗Publisher website ·

Excerpts are quoted from the journal's website; "model summary" lines are written by Workers AI and checked against the text. The journal's website is authoritative.

Profile

Publication details and official links

Publisher
Elsevier
Country or region
NETHERLANDS
Language
English
Frequency
Monthly
Founded
1983
ISSN
0167-9317
Electronic ISSN
1873-5568
Official links

FAQ

Frequently asked questions about Microelectronic Engineering

What CAS zone is Microelectronic Engineering in?

In the 2025 upgraded edition of the CAS Journal Ranking, Microelectronic Engineering is in Zone 3 of Engineering, and in Zone 3 of the minor category Engineering, Electrical & Electronic / Optics / Physics, Applied / Nanoscience & Nanotechnology. In the 2026 Xinrui edition it is in Zone 3 of Engineering. Zones from different editions, and from major and minor categories, are not interchangeable.

What is the impact factor of Microelectronic Engineering?

The latest impact factor listed by LetPub is 3.29; CiteScore 7.4, h-index 123.

How long does peer review take at Microelectronic Engineering?

The publisher reports about 59 days (submission to acceptance); authors report an average review time of about 6 months; the community-reported acceptance is “Easy”. Article statistics cover accepted papers only, publisher figures follow the journal's own definitions, and community reports come from authors' own submissions; none is a promise from the journal.

What are the manuscript requirements of Microelectronic Engineering?

According to the journal's author guidelines: Abstract: ≤ 250 words; Manuscript length: ≤ 8,000 words; Reference style: Numbered, in order of citation. A model extracted these from the author guidelines and each was checked against the text; check the latest version on the journal's website before submitting.

Where are the editorial board members of Microelectronic Engineering based?

Of the 62 board members whose country the journal's board page names, 19 (about 31%) are in mainland China; the countries named most often are Mainland China (19), Saudi Arabia (9) and India (6). Counted from the institutions listed on the board page; for reference only.

Which databases index Microelectronic Engineering?

According to LetPub and DOAJ records, Microelectronic Engineering is indexed in SCIE and Scopus.

Is Microelectronic Engineering open access, and what is the APC?

Microelectronic Engineering is a hybrid journal. For open-access publication: APC about USD 2,860.

Sources and updates

The facts on this page come from LetPub, Publisher website, OpenAlex; every figure is tagged with its source and the date it was observed, and conflicting values are kept per source. LetPub source page: view ↗ (archived 2026-08-26). Last updated: .