Journal profile · Materials Science, Multidisciplinary
Materials Science in Semiconductor Processing
ISSN 1369-8001 · eISSN 1873-4081 · Elsevier Ltd · ENGLAND · Bimonthly
Materials Science in Semiconductor Processing: CAS Zone 3 · Materials Science (2025 upgraded edition); impact factor 5.23; hybrid open access; APC about USD 3,540; review about 71 days (submission to acceptance, publisher); 1,016 articles in 2025; indexed in SCIE and Scopus.
Scope
Aims, scope and focus
Materials Science in Semiconductor Processing is published by Elsevier Ltd and is in Zone 3 of Materials Science in the CAS Journal Ranking (2025 upgraded edition). By OpenAlex counts of its recent articles, its largest topics are ZnO doping and properties, Advanced Photocatalysis Techniques and Semiconductor materials and devices, together about 24.4% of its articles. Its main subfields are Materials Chemistry and Electrical and Electronic Engineering. (generated from OpenAlex topic counts and CAS ranking data)
Functional Materials for (Opto)electronics, Sensors, Detectors, and Green Energy.Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications, and theoretical studies of functional semiconductor materials and devices. Each issue aims to provide a snapshot of current insights, new achievements, breakthroughs, perspectives, and future trends in material sciences for such diverse fields as advanced electronics and opto-electronics, sensors and detectors, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film deposition and growth technology, hybrid and quantum materials, device fabrication technology, and modelling, which are the backbone of advanced semiconductor processing and applications.Coverage will include: advanced lithography, etching, doping, annealing, and thin film processing for submicron and nano devices; material and device failure, reliability, damage evolution, and related issues; advanced chemical and physical vapor deposition; advanced metallization and interconnect schemes; compound semiconductor materials and processing; new dielectrics and non-oxide materials and their applications; (macro)molecular, hybrid, heterostructure, and quantum materials, devices, and processing; molecular dynamics, ab-initio methods, Monte Carlo simulations, data intensive and machine-learning based approaches, etc.; new materials and processes for discrete and integrated circuits; advanced electronic packaging materials and processes; magnetic materials and spintronics; crystal growth technology and mechanism; intrinsic impurities and defects of materials. Pure device simulation and modelling without connection to experiment is not within the aim and scope of this journal.
From the journal's Aims & Scope
Research area (LetPub): Materials Science, Multidisciplinary
Editor-in-chief Kuan Yew CheongPublisher website
Editorial board by country: 4 in mainland China (about 4%); most named United States 38, United Kingdom 8, Germany 6, Mainland China 4, South Korea 3 (97 members with a country) Editorial board ↗Publisher website ·
Main research topics OpenAlex counts of recent articles; shares are approximate
- ZnO doping and propertiesMaterials Science9%
- Advanced Photocatalysis TechniquesEnergy7.8%
- Semiconductor materials and devicesEngineering7.5%
- Gas Sensing Nanomaterials and SensorsEngineering6.8%
- Chalcogenide Semiconductor Thin FilmsEngineering6.8%
- Quantum Dots Synthesis And PropertiesMaterials Science5.8%
- Copper-based nanomaterials and applicationsMaterials Science5%
- Semiconductor materials and interfacesPhysics and Astronomy4.9%
Rankings & indexing
CAS ranking and database indexing
CAS Journal Ranking
CAS Journal Ranking, upgraded edition (March 2025)Materials Science Zone 3
| Level | Category | Zone |
|---|---|---|
| Major | Materials Science | Zone 3 |
| Minor | Physics, Condensed Matter | Zone 2 |
| Minor | Engineering, Electrical & Electronic | Zone 3 |
| Minor | Materials Science, Multidisciplinary | Zone 3 |
| Minor | Physics, Applied | Zone 3 |
Top journal: noReview journal: no
CAS Xinrui Journal Ranking (March 2026)Materials Science Zone 3
| Level | Category | Zone |
|---|---|---|
| Major | Materials Science | Zone 3 |
| Minor | Engineering, Electrical & Electronic | Zone 3 |
| Minor | Materials Science, Multidisciplinary | Zone 3 |
| Minor | Physics, Applied | Zone 3 |
| Minor | Physics, Condensed Matter | Zone 3 |
Top journal: noReview journal: not marked
CAS Journal Ranking, previous upgraded edition (December 2023)Engineering Zone 3
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 3 |
| Minor | Engineering, Electrical & Electronic | Zone 3 |
| Minor | Materials Science, Multidisciplinary | Zone 3 |
| Minor | Physics, Applied | Zone 3 |
| Minor | Physics, Condensed Matter | Zone 3 |
Top journal: noReview journal: no
Database indexing
SCIEScopusLetPub
International journal early-warning lists: not listed in any editionLetPub
Editions, and major and minor categories, are shown separately and never merged into one zone; check which edition your institution uses before you submit or report.
Metrics
Impact metrics and publication volume
Impact
- Impact factor
- 5.23LetPub ·
- Impact factor (publisher)
- 5.2Publisher website ·
- CiteScore 2026-06
- 8.7LetPub ·
- CiteScore (publisher)
- 8.7Publisher website ·
- SJR 2026-06
- 0.77LetPub ·
- SNIP 2026-06
- 1.07LetPub ·
- h-index
- 49LetPub ·
- h-index
- 115OpenAlex ·
- i10-index
- 5,287OpenAlex ·
- 2-year mean citedness
- 6.08OpenAlex ·
- Self-citation rate
- 3.8%LetPub ·
- Share of gold OA articles
- 10.45%LetPub ·
Volume
- Articles per year
- 967LetPub ·
Articles by year OpenAlex count · 10,648 in total · the current year is incomplete
| Year | Articles | Open access | Citations |
|---|---|---|---|
| 2026 | 731 | 172 | 416 |
| 2025 | 1,016 | 141 | 4,407 |
| 2024 | 1,034 | 162 | 12,081 |
| 2023 | 677 | 118 | 9,369 |
| 2022 | 726 | 59 | 13,052 |
| 2021 | 660 | 60 | 13,890 |
Sources count differently and were observed at different times, so each source's own value is kept; "publisher" marks figures from the journal's website.
Review & acceptance
Review time and acceptance
Publisher-reported review time from the journal's website
71 dayssubmission to acceptance · community reports about 1.7 months
The publisher's own definition applies; dates from this journal's articles in the last 24 months are not available yet, so the publisher's figure is used.
Figures by source
- Average review time (community reports)
- about 1.7 monthsLetPub ·
- Average acceptance (community reports)
- 88.33%LetPub ·
- Submission to first decision
- 1 daysPublisher website ·
- First decision after review
- 27 daysPublisher website ·
- Submission to acceptance
- 71 daysPublisher website ·
- Acceptance to publication
- 6 daysPublisher website ·
- Peer review
- Single anonymous peer reviewPublisher website
Community reports come from authors' own submissions (confidence 0.5) and are not a promise from the journal; for publisher figures, the journal's own definitions apply.
Fees & open access
APC and open-access policy
Hybrid open accessLetPub
A subscription journal in which authors can pay to publish their article open access.
| Source | APC | Fee waiver | License | Observed |
|---|---|---|---|---|
| OpenAlex | USD 3,540 / EUR 3,310 / GBP 2,830 / JPY 439,070 | — | — | |
| Publisher website | USD 3,280 | — | — |
A hybrid journal charges the APC only when the author chooses open access; publishing under the subscription model is usually free.
The journal's website is authoritative for fees; sources were observed at different times and each keeps its own value, without averaging.
Submission
Article types and submission policies (journal website)
Open calls for papers6, by deadline
- Advanced Electronic Packaging and Heterogenous Integration for Future Artificial Intelligence ApplicationsDeadline
- Advanced Packaging Techniques for Electronics and OptoelectronicsDeadline
- Magnetic and Multiferroic Semiconductors: Processing, Characterization, and Emerging ApplicationsDeadline
- Solar Chemistry and Photocatalysis: Energy and Environmental Applications - Materials Science in Semiconductor ProcessingDeadline
- Wide and ultra-wide-bandgap semiconductors and devices for electronics, optoelectronics and sensingDeadline
- Emerging Two-Dimensional Semiconductor Materials for Electronic and Optoelectronic ApplicationsDeadline
What to prepare3 items from the author guidelines
- Abstract
- ≤ 250 words
- Graphical abstract
- Required
- Cover letter
- Required
Article types accepted5
- letters to the editorTypes of contributions: Original research papers, reviews, letters to the editor.Original material: Submission of an article implies that the work described has…Length not stated
- original research paperTypes of contributions: Original research papers, reviews, letters to the editor.Original material: Submission of an article implies that the work described has…Length not stated
- original research papersTypes of contributions: Original research papers, reviews, letters to the editor.Length not stated
- reviewTypes of contributions: Original research papers, reviews, letters to the editor.Original material: Submission of an article implies that the work described has…Length not stated
- reviewsTypes of contributions: Original research papers, reviews, letters to the editor.Length not stated
Policy excerpts from the journal's websiteAI use, Authorship, Conflicts of interest, License & copyright, Open access, Peer review, Preprints
- AI use Declaration of generative AI use
Authors must declare the use of generative AI tools in the manuscript preparation process upon submission of the paper.Generative AI and AI-assisted technologies (“AI tools”) have been rapidly adopted in research and scholarly publishing, offering significant benefits while requiring clear standards for responsible and transparent use.Authors preparing a manuscript for this journal may use AI tool…
Source ↗Publisher website ·- Authorship Group authorship
Group authorship refers to the attribution of an article to a defined and named group of authors whose members have contributed to the work. Examples include research consortia, clinical trial groups, collaborative networks, task forces or working groups, expert panels or consensus groups, and participatory research groups. Group authorship must be declared on the title page at submission. When av…
Source ↗Publisher website ·- Conflicts of interest Declaration of competing interests
All authors must disclose any financial and personal relationships with other people or organizations that could inappropriately influence or bias their work. Examples of potential competing interests include:EmploymentConsultanciesStock ownershipHonorariaPaid expert testimonyPatent applications or registrationsGrants or any other fundingAffiliation with the journal as an Editor or Advisory Board …
Source ↗Publisher website ·- License & copyright License options
Authors will be offered open access user license options which will determine how you, and third parties, can reuse your open access article. We advise that you review these options and any funding body license requirements before selecting a license option.
Source ↗Publisher website ·- Open access Open access
We refer you to our open access information page to learn about open access options for this journal.
Source ↗Publisher website ·- Peer review Peer review
single anonymized review process Model summary
This journal follows a single anonymized review process. Your submission will initially be assessed by our editors. If your submission is deemed suitable, it will typically be sent to be reviewed by a minimum of two reviewers for an independent expert assessment of the scientific quality. The decision as to whether your article is accepted or rejected for publication will be made by our editors.Re…
Source ↗Publisher website ·- Preprints Preprints
Preprint sharingAuthors may share preprints in line with Elsevier's article sharing policy. Sharing preprints, such as on a preprint server, will not count as prior publication.We advise you to read our policy on multiple, redundant or concurrent publication. In support of Open Science, this journal offers its authors a free preprint posting service on SSRN, Elsevier’s preprint and early research …
Source ↗Publisher website ·
Excerpts are quoted from the journal's website; "model summary" lines are written by Workers AI and checked against the text. The journal's website is authoritative.
Profile
Publication details and official links
- Publisher
- Elsevier Ltd
- Country or region
- ENGLAND
- Language
- English
- Frequency
- Bimonthly
- ISSN
- 1369-8001
- Electronic ISSN
- 1873-4081
- Official links
- Journal homepage ↗LetPub
- Submission system ↗Publisher website
- Special issues ↗Publisher website
FAQ
Frequently asked questions about Materials Science in Semiconductor Processing
What CAS zone is Materials Science in Semiconductor Processing in?
In the 2025 upgraded edition of the CAS Journal Ranking, Materials Science in Semiconductor Processing is in Zone 3 of Materials Science, and in Zone 2 of the minor category Physics, Condensed Matter / Engineering, Electrical & Electronic / Materials Science, Multidisciplinary / Physics, Applied. In the 2026 Xinrui edition it is in Zone 3 of Materials Science. Zones from different editions, and from major and minor categories, are not interchangeable.
What is the impact factor of Materials Science in Semiconductor Processing?
The latest impact factor listed by LetPub is 5.23; CiteScore 8.7, h-index 115.
How long does peer review take at Materials Science in Semiconductor Processing?
The publisher reports about 71 days (submission to acceptance); authors report an average review time of about 1.7 months. Article statistics cover accepted papers only, publisher figures follow the journal's own definitions, and community reports come from authors' own submissions; none is a promise from the journal.
What are the manuscript requirements of Materials Science in Semiconductor Processing?
According to the journal's author guidelines: Abstract: ≤ 250 words; Graphical abstract: Required; Cover letter: Required. A model extracted these from the author guidelines and each was checked against the text; check the latest version on the journal's website before submitting.
Where are the editorial board members of Materials Science in Semiconductor Processing based?
Of the 97 board members whose country the journal's board page names, 4 (about 4%) are in mainland China; the countries named most often are United States (38), United Kingdom (8) and Germany (6). Counted from the institutions listed on the board page; for reference only.
Which databases index Materials Science in Semiconductor Processing?
According to LetPub and DOAJ records, Materials Science in Semiconductor Processing is indexed in SCIE and Scopus.
Is Materials Science in Semiconductor Processing open access, and what is the APC?
Materials Science in Semiconductor Processing is a hybrid journal. For open-access publication: APC about USD 3,540.
Sources and updates
The facts on this page come from LetPub, Publisher website, OpenAlex; every figure is tagged with its source and the date it was observed, and conflicting values are kept per source. LetPub source page: view ↗ (archived 2026-08-24). Last updated: .