Journal profile · Materials Science, Coatings & Films
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
ISSN 0734-2101 · eISSN 1520-8559 · AVS Science and Technology Society · UNITED STATES · Bimonthly
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A: CAS Zone 4 · Materials Science (2025 upgraded edition); impact factor 2.41; hybrid open access; review 3–6 weeks (community reports); community-reported acceptance: easy; 316 articles in 2025; indexed in SCIE and Scopus.
Scope
Aims, scope and focus
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A is published by AVS Science and Technology Society and is in Zone 4 of Materials Science in the CAS Journal Ranking (2025 upgraded edition). By OpenAlex counts of its recent articles, its largest topics are Semiconductor materials and devices, Metal and Thin Film Mechanics and Plasma Diagnostics and Applications, together about 34.5% of its articles. Its main subfields are Materials Chemistry. (generated from OpenAlex topic counts and CAS ranking data)
Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.
Source: LetPub
Research area (LetPub): Materials Science, Coatings & Films
Main research topics OpenAlex counts of recent articles; shares are approximate
- Semiconductor materials and devicesEngineering16%
- Metal and Thin Film MechanicsEngineering11.5%
- Plasma Diagnostics and ApplicationsEngineering7%
- Ion-surface interactions and analysisEngineering5.5%
- Diamond and Carbon-based Materials ResearchMaterials Science5%
- Electron and X-Ray Spectroscopy TechniquesMaterials Science4.9%
- Copper Interconnects and ReliabilityMaterials Science4.7%
- ZnO doping and propertiesMaterials Science4.6%
Rankings & indexing
CAS ranking and database indexing
CAS Journal Ranking
CAS Journal Ranking, upgraded edition (March 2025)Materials Science Zone 4
| Level | Category | Zone |
|---|---|---|
| Major | Materials Science | Zone 4 |
| Minor | Materials Science, Coatings & Films | Zone 3 |
| Minor | Physics, Applied | Zone 4 |
Top journal: noReview journal: no
CAS Xinrui Journal Ranking (March 2026)Materials Science Zone 4
| Level | Category | Zone |
|---|---|---|
| Major | Materials Science | Zone 4 |
| Minor | Materials Science, Coatings & Films | Zone 3 |
| Minor | Physics, Applied | Zone 4 |
Top journal: noReview journal: not marked
CAS Journal Ranking, previous upgraded edition (December 2023)Materials Science Zone 3
| Level | Category | Zone |
|---|---|---|
| Major | Materials Science | Zone 3 |
| Minor | Materials Science, Coatings & Films | Zone 3 |
| Minor | Physics, Applied | Zone 3 |
Top journal: noReview journal: no
Database indexing
SCIEScopusLetPub
International journal early-warning lists: not listed in any editionLetPub
Editions, and major and minor categories, are shown separately and never merged into one zone; check which edition your institution uses before you submit or report.
Metrics
Impact metrics and publication volume
Impact
- Impact factor
- 2.41LetPub ·
- CiteScore 2026-06
- 3.7LetPub ·
- SJR 2026-06
- 0.43LetPub ·
- SNIP 2026-06
- 0.75LetPub ·
- h-index
- 100LetPub ·
- h-index
- 177OpenAlex ·
- i10-index
- 9,678OpenAlex ·
- 2-year mean citedness
- 2.74OpenAlex ·
- Self-citation rate
- 12%LetPub ·
- Share of gold OA articles
- 15.52%LetPub ·
Volume
- Articles per year
- 311LetPub ·
Articles by year OpenAlex count · 18,169 in total · the current year is incomplete
| Year | Articles | Open access | Citations |
|---|---|---|---|
| 2026 | 266 | 66 | 96 |
| 2025 | 316 | 81 | 731 |
| 2024 | 343 | 90 | 1,711 |
| 2023 | 332 | 117 | 2,558 |
| 2022 | 242 | 89 | 2,163 |
| 2021 | 305 | 100 | 4,278 |
Sources count differently and were observed at different times, so each source's own value is kept; "publisher" marks figures from the journal's website.
Review & acceptance
Review time and acceptance
- Average review time (community reports)
- 3–6 weeksLetPub ·
- Average acceptance (community reports)
- EasyLetPub ·
Community reports come from authors' own submissions (confidence 0.5) and are not a promise from the journal; for publisher figures, the journal's own definitions apply.
Fees & open access
APC and open-access policy
Hybrid open accessLetPub
A subscription journal in which authors can pay to publish their article open access.
No source has fee information yet; check the journal's website.
A hybrid journal charges the APC only when the author chooses open access; publishing under the subscription model is usually free.
The journal's website is authoritative for fees; sources were observed at different times and each keeps its own value, without averaging.
Profile
Publication details and official links
- Publisher
- AVS Science and Technology Society
- Country or region
- UNITED STATES
- Language
- English
- Frequency
- Bimonthly
- ISSN
- 0734-2101
- Electronic ISSN
- 1520-8559
- Official links
- Journal homepage ↗LetPub
- Submission system ↗LetPub
FAQ
Frequently asked questions about JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
What CAS zone is JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A in?
In the 2025 upgraded edition of the CAS Journal Ranking, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A is in Zone 4 of Materials Science, and in Zone 3 of the minor category Materials Science, Coatings & Films / Physics, Applied. In the 2026 Xinrui edition it is in Zone 4 of Materials Science. Zones from different editions, and from major and minor categories, are not interchangeable.
What is the impact factor of JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A?
The latest impact factor listed by LetPub is 2.41; CiteScore 3.7, h-index 177.
How long does peer review take at JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A?
Authors report an average review time of 3–6 weeks; the community-reported acceptance is “Easy”. Article statistics cover accepted papers only, publisher figures follow the journal's own definitions, and community reports come from authors' own submissions; none is a promise from the journal.
Which databases index JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A?
According to LetPub and DOAJ records, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A is indexed in SCIE and Scopus.
Is JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A open access, and what is the APC?
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A is a hybrid journal. Fee information is not available yet; check the journal's website.
Sources and updates
The facts on this page come from LetPub, OpenAlex; every figure is tagged with its source and the date it was observed, and conflicting values are kept per source. LetPub source page: view ↗ (archived 2026-08-25). Last updated: .