Journal profile · Materials Science-Materials Chemistry
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
ISSN 2166-2746 · eISSN 2166-2754 · AVS Science and Technology Society
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics: CAS Zone 4 · Engineering (2025 upgraded edition); subscription journal; 182 articles in 2025; indexed in Scopus.
Scope
Aims, scope and focus
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is published by AVS Science and Technology Society and is in Zone 4 of Engineering in the CAS Journal Ranking (2025 upgraded edition). By OpenAlex counts of its recent articles, its largest topics are Semiconductor materials and devices, Advancements in Photolithography Techniques and Integrated Circuits and Semiconductor Failure Analysis, together about 26.7% of its articles. Its main subfields are Electrical and Electronic Engineering. (generated from OpenAlex topic counts and CAS ranking data)
Research area (LetPub): Materials Science-Materials Chemistry
Main research topics OpenAlex counts of recent articles; shares are approximate
- Semiconductor materials and devicesEngineering14.6%
- Advancements in Photolithography TechniquesEngineering6.7%
- Integrated Circuits and Semiconductor Failure AnalysisEngineering5.4%
- GaN-based semiconductor devices and materialsPhysics and Astronomy5.2%
- Nanofabrication and Lithography TechniquesEngineering4.8%
- ZnO doping and propertiesMaterials Science4.3%
- Ion-surface interactions and analysisEngineering4.3%
- Nanowire Synthesis and ApplicationsEngineering4.2%
Rankings & indexing
CAS ranking and database indexing
CAS Journal Ranking
CAS Journal Ranking, upgraded edition (March 2025)Engineering Zone 4
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 4 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Nanoscience & Nanotechnology | Zone 4 |
| Minor | Physics, Applied | Zone 4 |
Top journal: noReview journal: no
CAS Xinrui Journal Ranking (March 2026)Engineering Zone 4
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 4 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Nanoscience & Nanotechnology | Zone 4 |
| Minor | Physics, Applied | Zone 4 |
Top journal: noReview journal: not marked
CAS Journal Ranking, previous upgraded edition (December 2023)Engineering Zone 4
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 4 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Nanoscience & Nanotechnology | Zone 4 |
| Minor | Physics, Applied | Zone 4 |
Top journal: noReview journal: no
Database indexing
ScopusLetPub
International journal early-warning lists: not listed in any editionLetPub
Editions, and major and minor categories, are shown separately and never merged into one zone; check which edition your institution uses before you submit or report.
Metrics
Impact metrics and publication volume
Impact
- CiteScore 2026-06
- 2.5LetPub ·
- SJR 2026-06
- 0.36LetPub ·
- SNIP 2026-06
- 0.69LetPub ·
- h-index
- 63OpenAlex ·
- i10-index
- 1,509OpenAlex ·
- 2-year mean citedness
- 2.16OpenAlex ·
- Share of gold OA articles
- 0%LetPub ·
Articles by year OpenAlex count · 4,540 in total · the current year is incomplete
| Year | Articles | Open access | Citations |
|---|---|---|---|
| 2026 | 117 | 20 | 25 |
| 2025 | 182 | 24 | 241 |
| 2024 | 187 | 39 | 784 |
| 2023 | 190 | 47 | 749 |
| 2022 | 161 | 39 | 903 |
| 2021 | 157 | 38 | 1,002 |
Sources count differently and were observed at different times, so each source's own value is kept; "publisher" marks figures from the journal's website.
Fees & open access
APC and open-access policy
Subscription journalLetPub
A subscription journal: articles are read by subscription or purchase, and authors usually pay no publication charge.
No source has fee information yet; check the journal's website.
The journal's website is authoritative for fees; sources were observed at different times and each keeps its own value, without averaging.
Profile
Publication details and official links
- Publisher
- AVS Science and Technology Society
- ISSN
- 2166-2746
- Electronic ISSN
- 2166-2754
- Official links
- Journal homepage ↗OpenAlex
FAQ
Frequently asked questions about Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
What CAS zone is Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics in?
In the 2025 upgraded edition of the CAS Journal Ranking, Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is in Zone 4 of Engineering, and in Zone 4 of the minor category Engineering, Electrical & Electronic / Nanoscience & Nanotechnology / Physics, Applied. In the 2026 Xinrui edition it is in Zone 4 of Engineering. Zones from different editions, and from major and minor categories, are not interchangeable.
Which databases index Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?
According to LetPub and DOAJ records, Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is indexed in Scopus.
Is Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics open access, and what is the APC?
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is a subscription journal. Fee information is not available yet; check the journal's website.
Sources and updates
The facts on this page come from LetPub, OpenAlex; every figure is tagged with its source and the date it was observed, and conflicting values are kept per source. LetPub source page: view ↗ (archived 2026-08-26). Last updated: .