Journal profile · ENGINEERING, ELECTRICAL & ELECTRONIC-NANOSCIENCE & NANOTECHNOLOGY
Journal of Micro-Nanolithography MEMS and MOEMS
ISSN 1932-5150 · eISSN 1932-5134 · SPIE · UNITED STATES · Quarterly · Founded 2007
Journal of Micro-Nanolithography MEMS and MOEMS: CAS Zone 3 · Physics & Astronomy (2025 upgraded edition); impact factor 1.81; hybrid open access; review 6–12 weeks (community reports); community-reported acceptance: easy; indexed in Scopus.
Scope
Aims, scope and focus
Journal of Micro-Nanolithography MEMS and MOEMS is published by SPIE and is in Zone 3 of Physics & Astronomy in the CAS Journal Ranking (2025 upgraded edition). By OpenAlex counts of its recent articles, its largest topics are Advancements in Photolithography Techniques, Silicon and Solar Cell Technologies and Advanced Surface Polishing Techniques, together about 38.8% of its articles. Its main subfields are Electrical and Electronic Engineering and Biomedical Engineering. (generated from OpenAlex topic counts and CAS ranking data)
The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microelectromechanical systems, micro-optoelectromechanical systems, and photonics industries.
Source: LetPub
Research area (LetPub): ENGINEERING, ELECTRICAL & ELECTRONIC-NANOSCIENCE & NANOTECHNOLOGY
Main research topics OpenAlex counts of recent articles; shares are approximate
- Advancements in Photolithography TechniquesEngineering24.5%
- Silicon and Solar Cell TechnologiesEngineering8.2%
- Advanced Surface Polishing TechniquesEngineering6.1%
- Electronic Packaging and Soldering TechnologiesEngineering4.1%
- Advanced X-ray Imaging TechniquesPhysics and Astronomy4.1%
- Copper Interconnects and ReliabilityMaterials Science4.1%
- Optical Coatings and GratingsMaterials Science4.1%
- Nonlinear Optical Materials StudiesEngineering4.1%
Rankings & indexing
CAS ranking and database indexing
CAS Journal Ranking
CAS Journal Ranking, upgraded edition (March 2025)Physics & Astronomy Zone 3
| Level | Category | Zone |
|---|---|---|
| Major | Physics & Astronomy | Zone 3 |
| Minor | Optics | Zone 3 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Materials Science, Multidisciplinary | Zone 4 |
| Minor | Nanoscience & Nanotechnology | Zone 4 |
Top journal: noReview journal: no
CAS Xinrui Journal Ranking (March 2026)Physics & Astronomy Zone 3
| Level | Category | Zone |
|---|---|---|
| Major | Physics & Astronomy | Zone 3 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Nanoscience & Nanotechnology | Zone 4 |
| Minor | Materials Science, Multidisciplinary | Zone 4 |
| Minor | Optics | Zone 4 |
Top journal: noReview journal: not marked
CAS Journal Ranking, previous upgraded edition (December 2023)Physics & Astronomy Zone 2
| Level | Category | Zone |
|---|---|---|
| Major | Physics & Astronomy | Zone 2 |
| Minor | Engineering, Electrical & Electronic | Zone 3 |
| Minor | Materials Science, Multidisciplinary | Zone 3 |
| Minor | Nanoscience & Nanotechnology | Zone 3 |
| Minor | Optics | Zone 3 |
Top journal: noReview journal: no
Database indexing
ScopusLetPub
International journal early-warning lists: not listed in any editionLetPub
Editions, and major and minor categories, are shown separately and never merged into one zone; check which edition your institution uses before you submit or report.
Metrics
Impact metrics and publication volume
Impact
- Impact factor
- 1.81LetPub ·
- CiteScore 2026-06
- 3.4LetPub ·
- SJR 2026-06
- 0.39LetPub ·
- SNIP 2026-06
- 1.72LetPub ·
- h-index
- 37LetPub ·
- h-index
- 2OpenAlex ·
- i10-index
- 1OpenAlex ·
- 2-year mean citedness
- 0OpenAlex ·
- Share of gold OA articles
- 7.69%LetPub ·
Articles by year OpenAlex count · 19 in total · the current year is incomplete
| Year | Articles | Open access | Citations |
|---|---|---|---|
| 2026 | 10 | 10 | 0 |
Sources count differently and were observed at different times, so each source's own value is kept; "publisher" marks figures from the journal's website.
Review & acceptance
Review time and acceptance
- Average review time (community reports)
- 6–12 weeksLetPub ·
- Average acceptance (community reports)
- EasyLetPub ·
Community reports come from authors' own submissions (confidence 0.5) and are not a promise from the journal; for publisher figures, the journal's own definitions apply.
Fees & open access
APC and open-access policy
Hybrid open accessLetPub
A subscription journal in which authors can pay to publish their article open access.
No source has fee information yet; check the journal's website.
A hybrid journal charges the APC only when the author chooses open access; publishing under the subscription model is usually free.
The journal's website is authoritative for fees; sources were observed at different times and each keeps its own value, without averaging.
Profile
Publication details and official links
- Publisher
- SPIE
- Country or region
- UNITED STATES
- Language
- English
- Frequency
- Quarterly
- Founded
- 2007
- ISSN
- 1932-5150
- Electronic ISSN
- 1932-5134
- Official links
- Journal homepage ↗LetPub
- Submission system ↗LetPub
FAQ
Frequently asked questions about Journal of Micro-Nanolithography MEMS and MOEMS
What CAS zone is Journal of Micro-Nanolithography MEMS and MOEMS in?
In the 2025 upgraded edition of the CAS Journal Ranking, Journal of Micro-Nanolithography MEMS and MOEMS is in Zone 3 of Physics & Astronomy, and in Zone 3 of the minor category Optics / Engineering, Electrical & Electronic / Materials Science, Multidisciplinary / Nanoscience & Nanotechnology. In the 2026 Xinrui edition it is in Zone 3 of Physics & Astronomy. Zones from different editions, and from major and minor categories, are not interchangeable.
What is the impact factor of Journal of Micro-Nanolithography MEMS and MOEMS?
The latest impact factor listed by LetPub is 1.81; CiteScore 3.4, h-index 2.
How long does peer review take at Journal of Micro-Nanolithography MEMS and MOEMS?
Authors report an average review time of 6–12 weeks; the community-reported acceptance is “Easy”. Article statistics cover accepted papers only, publisher figures follow the journal's own definitions, and community reports come from authors' own submissions; none is a promise from the journal.
Which databases index Journal of Micro-Nanolithography MEMS and MOEMS?
According to LetPub and DOAJ records, Journal of Micro-Nanolithography MEMS and MOEMS is indexed in Scopus.
Is Journal of Micro-Nanolithography MEMS and MOEMS open access, and what is the APC?
Journal of Micro-Nanolithography MEMS and MOEMS is a hybrid journal. Fee information is not available yet; check the journal's website.
Sources and updates
The facts on this page come from LetPub, OpenAlex; every figure is tagged with its source and the date it was observed, and conflicting values are kept per source. LetPub source page: view ↗ (archived 2026-08-24). Last updated: .