Journal profile · Engineering, Electrical & Electronic
IEEE Transactions on Semiconductor Manufacturing
ISSN 0894-6507 · eISSN 1558-2345 · Institute of Electrical and Electronics Engineers Inc. · UNITED STATES · Quarterly
IEEE Transactions on Semiconductor Manufacturing: CAS Zone 4 · Engineering (2025 upgraded edition); impact factor 2.43; subscription journal; APC about USD 2,645; review about 6 months (community reports); community-reported acceptance: easy; 143 articles in 2025; indexed in SCIE and Scopus.
Scope
Aims, scope and focus
IEEE Transactions on Semiconductor Manufacturing is published by Institute of Electrical and Electronics Engineers Inc. and is in Zone 4 of Engineering in the CAS Journal Ranking (2025 upgraded edition). By OpenAlex counts of its recent articles, its largest topics are Industrial Vision Systems and Defect Detection, Integrated Circuits and Semiconductor Failure Analysis and Semiconductor materials and devices, together about 31.1% of its articles. Its main subfields are Electrical and Electronic Engineering and Industrial and Manufacturing Engineering. (generated from OpenAlex topic counts and CAS ranking data)
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.
Source: LetPub
Research area (LetPub): Engineering, Electrical & Electronic
Main research topics OpenAlex counts of recent articles; shares are approximate
- Industrial Vision Systems and Defect DetectionEngineering11.5%
- Integrated Circuits and Semiconductor Failure AnalysisEngineering10%
- Semiconductor materials and devicesEngineering9.7%
- Manufacturing Process and OptimizationEngineering8.6%
- Advancements in Photolithography TechniquesEngineering6.5%
- Advancements in Semiconductor Devices and Circuit DesignEngineering5.6%
- Scheduling and Optimization AlgorithmsEngineering4.8%
- Silicon and Solar Cell TechnologiesEngineering4.5%
Rankings & indexing
CAS ranking and database indexing
CAS Journal Ranking
CAS Journal Ranking, upgraded edition (March 2025)Engineering Zone 4
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 4 |
| Minor | Physics, Condensed Matter | Zone 3 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Engineering, Manufacturing | Zone 4 |
| Minor | Physics, Applied | Zone 4 |
Top journal: noReview journal: no
CAS Xinrui Journal Ranking (March 2026)Engineering Zone 3
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 3 |
| Minor | Engineering, Manufacturing | Zone 4 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Physics, Applied | Zone 3 |
| Minor | Physics, Condensed Matter | Zone 3 |
Top journal: noReview journal: not marked
CAS Journal Ranking, previous upgraded edition (December 2023)Engineering Zone 3
| Level | Category | Zone |
|---|---|---|
| Major | Engineering | Zone 3 |
| Minor | Physics, Applied | Zone 3 |
| Minor | Physics, Condensed Matter | Zone 3 |
| Minor | Engineering, Electrical & Electronic | Zone 4 |
| Minor | Engineering, Manufacturing | Zone 4 |
Top journal: noReview journal: no
Database indexing
SCIEScopusLetPub
International journal early-warning lists: not listed in any editionLetPub
Editions, and major and minor categories, are shown separately and never merged into one zone; check which edition your institution uses before you submit or report.
Metrics
Impact metrics and publication volume
Impact
- Impact factor
- 2.43LetPub ·
- CiteScore 2026-06
- 4.8LetPub ·
- SJR 2026-06
- 0.57LetPub ·
- SNIP 2026-06
- 1.14LetPub ·
- h-index
- 59LetPub ·
- h-index
- 102OpenAlex ·
- i10-index
- 1,226OpenAlex ·
- 2-year mean citedness
- 1.94OpenAlex ·
- Self-citation rate
- 4%LetPub ·
- Share of gold OA articles
- 4.51%LetPub ·
Volume
- Articles per year
- 98LetPub ·
Articles by year OpenAlex count · 3,213 in total · the current year is incomplete
| Year | Articles | Open access | Citations |
|---|---|---|---|
| 2026 | 88 | 4 | 114 |
| 2025 | 143 | 14 | 206 |
| 2024 | 100 | 19 | 323 |
| 2023 | 105 | 35 | 620 |
| 2022 | 109 | 43 | 1,028 |
| 2021 | 97 | 38 | 975 |
Sources count differently and were observed at different times, so each source's own value is kept; "publisher" marks figures from the journal's website.
Review & acceptance
Review time and acceptance
- Average review time (community reports)
- about 6 monthsLetPub ·
- Average acceptance (community reports)
- EasyLetPub ·
Community reports come from authors' own submissions (confidence 0.5) and are not a promise from the journal; for publisher figures, the journal's own definitions apply.
Fees & open access
APC and open-access policy
Subscription journalLetPub
A subscription journal: articles are read by subscription or purchase, and authors usually pay no publication charge.
| Source | APC | Fee waiver | License | Observed |
|---|---|---|---|---|
| OpenAlex | USD 2,645 | — | — |
The journal's website is authoritative for fees; sources were observed at different times and each keeps its own value, without averaging.
Profile
Publication details and official links
- Publisher
- Institute of Electrical and Electronics Engineers Inc.
- Country or region
- UNITED STATES
- Language
- English
- Frequency
- Quarterly
- ISSN
- 0894-6507
- Electronic ISSN
- 1558-2345
- Official links
- Journal homepage ↗OpenAlex
- Submission system ↗LetPub
FAQ
Frequently asked questions about IEEE Transactions on Semiconductor Manufacturing
What CAS zone is IEEE Transactions on Semiconductor Manufacturing in?
In the 2025 upgraded edition of the CAS Journal Ranking, IEEE Transactions on Semiconductor Manufacturing is in Zone 4 of Engineering, and in Zone 3 of the minor category Physics, Condensed Matter / Engineering, Electrical & Electronic / Engineering, Manufacturing / Physics, Applied. In the 2026 Xinrui edition it is in Zone 3 of Engineering. Zones from different editions, and from major and minor categories, are not interchangeable.
What is the impact factor of IEEE Transactions on Semiconductor Manufacturing?
The latest impact factor listed by LetPub is 2.43; CiteScore 4.8, h-index 102.
How long does peer review take at IEEE Transactions on Semiconductor Manufacturing?
Authors report an average review time of about 6 months; the community-reported acceptance is “Easy”. Article statistics cover accepted papers only, publisher figures follow the journal's own definitions, and community reports come from authors' own submissions; none is a promise from the journal.
Which databases index IEEE Transactions on Semiconductor Manufacturing?
According to LetPub and DOAJ records, IEEE Transactions on Semiconductor Manufacturing is indexed in SCIE and Scopus.
Is IEEE Transactions on Semiconductor Manufacturing open access, and what is the APC?
IEEE Transactions on Semiconductor Manufacturing is a subscription journal. APC about USD 2,645.
Sources and updates
The facts on this page come from LetPub, OpenAlex; every figure is tagged with its source and the date it was observed, and conflicting values are kept per source. LetPub source page: view ↗ (archived 2026-08-26). Last updated: .